Brooks Instrument's GF120 mass flow controller features a Safe Delivery System
Brooks Instrument offers a Safe Delivery System (SDS) option for its GF120 mass flow controllers. The GF120 SDS is a low-pressure drop mass flow controller that is designed to deliver sub-atmospheric SDS gases.
Many mass flow controllers require a 50 Torr differential pressure at flow rates of 5 sccm; however, with that pressure drop, only about 65% of the dopant can be extracted. The GF120 SDS low-pressure operation enables a further 30% of the dopant to be extracted. The devices are available in full-scale flow ranges from 4 sccm to 1 slpm.