Brooks Instrument's CMC and XacTorr Series digital capacitance manometers are designed for vacuum measurement applications
Brooks Instrument's CMC and XacTorr Series digital capacitance manometers are engineered to improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects in vacuum measurement applications.
Brooks’ CMC Series manometers are unheated gauges featuring all-welded construction and Inconel sensing diaphragm. They are available in full-scale ranges from 10 to 1,000 Torr.
Brooks’ XacTorr digital capacitance manometers are heated gauges that use dual-zone heating to offer 0.1° C temperature uniformity. These gauges combine Brooks’ Mark-IV shielded sensor technology and digital temperature control. The XacTorr capacitance manometers are offered in three operating temperatures (45°, 100° and 160° C) with full-scale measurement ranges from 100 milliTorr to 1,000 Torr.
XacTorr capacitance manometers include an RS-485 dataport, enabling in-situ monitoring and troubleshooting without disturbing communication with the vacuum chamber control system. They also offer RS-485, DeviceNet or analog 0 to 10 VDC communications.