Brooks Instrument's enhanced GF Series mass flow controllers feature a flow rate of 55 slpm
Brooks Instrument has increased the range of flow rates available on the GF Series ultra-high purity mass flow controllers from the current 3 sccm to 30 slpm to a full-scale flow rate of 55 slpm.
The GF Series features Brooks MultiFlo technology, which is designed to enable re-programming of the gas and full-scale range without removing the mass flow controller from the gas line. GF Series flow settling time ranges from 300 ms (GF125) to one-second (GF100/120). For applications requiring a slower flow response, a user-programmable ramp function linearly transitions the flow between set points over a period of up to one hour with a resolution of 2 ms.
The all-metal flow path is designed to ensure compatibility with all gas media, while the GF’s minimal internal surface area and fully swept flow path is engineered for rapid purge and clean up.
The GF Series is offered in full-scale ranges from 3 sccm to 55 slpm with normally open or normally closed valves and multiple communication protocols, including Analog 0-5VDC, RS485 and DeviceNet.